Abstract
Nanoscale organic-inorganic films were grown using the sol-gel technology and were used as advanced sources of boron and gadolinium diffusion into silicon. Features of boron depth profiles in the case of its separate diffusion and simultaneous diffusion with gadolinium from grown films were studied by secondary ion mass spectrometry. A program was developed and numerical simulation was performed, which provided adequate description of complex portions of experimentally measured boron diffusion profiles. A model was proposed, which considers the boron redistribution between the glassy film and oxide layer. This model allowed determination of the optimum boron diffusivities providing the best agreement between experimental and calculated results.
Similar content being viewed by others
References
Z. Yu. Gotra, Technology of Microelectronic Devices, Handbook (Radio Svyaz’, Moscow, 1991) [in Russian].
V. V. Novikov, Theoretical Bases of Microelectronics, the Schoolbook (Vyssh. Shkola, Moscow, 1972) [in Russian].
A. I. Borisenko, V. V. Novikov, N. E. Prikhod’ko, I. M. Mitnikova, and L. F. Chepik, Thin Inorganic Films in Microelectronics (Nauka, Leningrad, 1972) [in Russian].
O. V. Aleksandrov, A. O. Zakhar’in, and N. A. Sobolev, Fiz. Tekh. Poluprovodn. 39, 776 (2005) [Semiconductors 39, 742 (2005)].
V. G. Lifshits, Soros. Obraz. Zh., No. 2, 107 (1997).
O. A. Shilova, Fiz. Khim. Stekla 31, 270 (2005) [Glass Phys. Chem. 31, 201 (2005)].
V. A. Moshnikov and O. A. Shilova, Sol-Gel Technology of Nanostructured Materials. Ser. Nanotechnology: Physics, Processes, Diagnostics, Devices, Ed. by V. V. Luchinin and Yu. M. Tairov (Fizmatlit, Moscow, 2006), p. 205.
Yu. Z. Bubnov and O. A. Shilova, Tekhnol. Priborostroen., No. 3 (7), 60 (2003).
A. M. Gulyaev, Le Van Van, O. B. Sarach, and O. B. Mukhina, Fiz. Tekh. Poluprovodn. 42, 742 (2008) [Semiconductors 42, 726 (2008)].
S. Zaĭnabidinov and D. É. Nazyrov, Izv. Vyssh. Uchebn. Zaved., Ser. Élektron., No. 1, 87 (2007).
A. I. Maksimov, V. A. Moshnikov, Yu. M. Tairov, and O. A. Shilova, Sol-Gel Technology. Basics of Sol-Gel Technology of Nanocomposites (Élmor, St.-Petersburg, 2007) [in Russian].
I. V. Smirnova, O. A. Shilova, V. A. Moshnikov, M. F. Panov, V. V. Shevchenko, and N. S. Klimenko, Fiz. Khim. Stekla 32, 632 (2006) [Glass Phys. Chem. 32, 460 (2006)].
I. V. Smirnova, O. A. Shilova, V. A. Zhabrev, and Yu. Z. Bubnov, in Proc. of the 12th Intern. Sci.-Techn. Conf. (Tekhnomash, Moscow, 2006), p. 64.
Atomic Diffusion in Semiconductors, Ed. by D. Shaw (Plenum, New York, 1973; Mir, Moscow, 1975).
A. G. Kozlov, Izv. LÉTI 338, 79 (1984).
A. Leyderman, D. Arcos, and Y.-C. Lee Charles, in Proc. of the Conf. on Photorefractive Fiber and Crystal Devices: Materials, Optical Properties and Applications VII, Proc. SPIE 4459, 210 (2001).
H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel, J. Electrochem. Soc. 137(11), 190 (1990).
A. I. Kurnosov and V. V. Yudin, Technology of Semiconductor Devices Production, A Textbook (Vyssh. Shkola, Moscow, 1974) [in Russian].
O. A. Shilova, E. V. Tarasyuk, V. V. Shevchenko, N. S. Klimenko, T. G. Movchan, S. V. Khashkovskiĭ, and V. V. Shilov, Fiz. Khim. Stekla 29, 527 (2003) [Glass Phys. Chem. 29, 378 (2003)].
I. V. Smirnova, O. A. Shilova, L. P. Efimenko, K. É. Pugachev, V. A. Moshnikov, and Yu. Z. Bubnov, Fiz. Khim. Stekla 33, 429 (2007) [Glass Phys. Chem. 33, 306 (2007)].
I. V. Smirnova, O. A. Shilova, and V. A. Moshnikov, Izv. LÉTI, No. 2, 3 (2004).
O. V. Aleksandrov, S. A. Vysotskaya, I. V. Smirnova, and O. A. Shilova, Mater. Élektron. Tekhn., No. 1, 22 (2008).
I. V. Smirnova, O. A. Shilova, V. A. Zhabrev, and Yu. Z. Bubnov, Fiz. Khim. Stekla 35, 127 (2009) [Glass Phys. Chem. 35, 102 (2009)].
I. V. Smirnova, Candidate’s Dissertation (IKhS RAN, St.-Petersburg, 2007).
A. F. Filippov, Introduction to the Theory of Differential Equations (KomKniga, St.-Petersburg, 2007) [in Russian].
B. P. Demidovich, Short Course in Higher Mathematics (AST, Moscow, 2005) [in Russian].
N. N. Oleĭnikov and G. P. Murav’eva, Chemistry. Basic Algorithms for Problem Solving, Ed. Yu. D. Tret’yakov (UNTsDO, Fizmatlit, Moscow, 2003) [in Russian].
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © I.V. Smirnova, O.A. Shilova, V.A. Moshnikov, A.E. Gamarts, 2009, published in Fizika i Tekhnika Poluprovodnikov, 2009, Vol. 43, No. 10, pp. 1434–1439.
Rights and permissions
About this article
Cite this article
Smirnova, I.V., Shilova, O.A., Moshnikov, V.A. et al. Features of simultaneous diffusion of boron and gadolinium in silicon from nanoscale hybrid organic-inorganic films. Semiconductors 43, 1394–1399 (2009). https://doi.org/10.1134/S1063782609100248
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063782609100248