Abstract
Optically and mechanically controlled attenuators and an electrically controlled phase shifter are developed on the basis of a dielectric waveguide made of the high-resistance silicon. The characteristics of the waveguide and elements developed on its basis are theoretically and experimentally determined in the frequency band 26–37 GHz.
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Funding
This study was supported by the budget funding within the framework of state task.
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Translated by I. Efimova
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Parkhomenko, M.P., Kalenov, D.S., Eremin, I.S. et al. Dielectric Waveguide Made of the High-Resistance Silicon and the Circuitry Based on This Waveguide. J. Commun. Technol. Electron. 68, 169–174 (2023). https://doi.org/10.1134/S1064226923020110
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DOI: https://doi.org/10.1134/S1064226923020110