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A New Method for Synchrotron Radiation X-Ray Imaging of Micro-Objects using Nanofocusing Optics and Tomography

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Abstract

a new absorption-based method for studying the internal structure of micro-objects using synchrotron radiation is proposed. The method registers the integral intensity of the beam after passing through the object, and the locality is achieved by focusing the beam with a refractive lens into a nanometer-wide line. In this case, phase contrast is not utilized, the result is obtained immediately, and two-dimensional images of an object are calculated by computed tomography. The method does not require complex mathematical calculations and gives high accuracy results. Model experiments using a silicon carbide substrate and some other parameters were performed for illustrative purposes.

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Funding

The work of V.G. Kohn was supported by the Ministry of Science and Higher Education of the Russian Federation (project 075-15-2021-1362) and, partially, by the Russian Foundation for Basic Research (grant No. 19-29-12043 mk). The work of T. S. Argunova was supported financially by the Russian Foundation for Basic Research (grant No. 19-29-12041 mk) and, partially, by the Ministry of Science and Higher Education of the Russian Federation (project 075-15-2021-1349).

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Authors and Affiliations

  1. National Research Centre “Kurchatov Institute”, Moscow, Russia

    V. G. Kohn

  2. Ioffe Institute, St. Petersburg, Russia

    T. S. Argunova

Authors
  1. V. G. Kohn
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  2. T. S. Argunova
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Correspondence to T. S. Argunova.

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Kohn, V.G., Argunova, T.S. A New Method for Synchrotron Radiation X-Ray Imaging of Micro-Objects using Nanofocusing Optics and Tomography. Tech. Phys. Lett. 49 (Suppl 4), S315–S318 (2023). https://doi.org/10.1134/S1063785023010170

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