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Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode

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Abstract

We propose a method for obtaining TiN coatings by reactive anodic evaporation of titanium using a high-current (30 A) discharge with a self-heated hollow cathode in an Ar + N2 gas mixture. The optical spectral analysis shows that the gas-discharge plasma contains a large amount of activated titanium, while the fraction of singly charged metal ions supplied from the plasma to substrate reaches up to 70%. Titanium coatings with 2-μm thickness and up to 24-GPa hardness were obtained at a nitrogen flow rate of 5 cm3/min. The rate of TiN deposition at a distance of 7 cm from the vapor source amounted to ~4 μm/h.

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REFERENCES

  1. A. Anders, Thin Solid Films 518, 4087 (2010). https://doi.org/10.1016/j.tsf.2009.10.145

    Article  ADS  Google Scholar 

  2. J.-W. Lim, H.-S. Park, T.-H. Park, J.-J. Lee, and J. Joo, J. Vac. Sci. Technol. A 18, 524 (2000). https://doi.org/10.1116/1.582219

    Article  ADS  Google Scholar 

  3. I. I. Aksenov, Vacuum Arc in Erosional Plasma Sources (NNTs KhFTI, Khar’kov, 2005) [in Russian].

  4. N. V. Gavrilov, A. S. Kamenetskikh, P. V. Tretnikov, and A. V. Chukin, Surf. Coat. Technol. 337, 453 (2018). https://doi.org/10.1016/j.surfcoat.2018.01.058

    Article  Google Scholar 

  5. N. V. Gavrilov and A. I. Men’shakov, Instrum. Exp. Tech. 54, 732 (2011). https://doi.org/10.1134/S0020441211050046

    Article  Google Scholar 

  6. G. Y. Yushkov, A. Anders, E. M. Oks, and I. G. Brown, J. Appl. Phys. 88, 5618 (2000). https://doi.org/10.1063/1.1321789

    Article  ADS  Google Scholar 

  7. A. I. Hershcovitch, Appl. Phys. Lett. 68, 464 (1996). https://doi.org/10.1063/1.116414

    Article  ADS  Google Scholar 

  8. G. V. Samsonov, Nitrides (Naukova Dumka, Kiev, 1969), p. 138 [in Russian].

    Google Scholar 

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Funding

This work was supported by the Russian Science Foundation, project no. 20-79-10059.

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Authors and Affiliations

  1. Institute of Electrophysics, Ural Branch, Russian Academy of Sciences, 620016, Yekaterinburg, Russia

    A. I. Men’shakov & D. R. Emlin

  2. Ural Federal University, 620075, Yekaterinburg, Russia

    A. I. Men’shakov

Authors
  1. A. I. Men’shakov
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  2. D. R. Emlin
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Correspondence to A. I. Men’shakov.

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The authors declare that they have no conflicts of interest.

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Translated by P. Pozdeev

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Men’shakov, A.I., Emlin, D.R. Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode. Tech. Phys. Lett. 47, 511–514 (2021). https://doi.org/10.1134/S1063785021050254

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  • DOI: https://doi.org/10.1134/S1063785021050254

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