Abstract
It was found that in a hydrogen-methane mixture in microwave plasma reactor for diamond deposition, there is a threshold pressure after which the contraction of microwave discharge occurs. The results of measurements of gas temperature and spatial distributions of optical emission intensity of discharge are presented. The mechanism of discharge contraction is discussed.
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Bogdanov, S.A., Gorbachev, A.M., Radishev, D.B. et al. Contraction of Microwave Discharge in the Reactor for Chemical Vapor Deposition of Diamond. Tech. Phys. Lett. 45, 89–92 (2019). https://doi.org/10.1134/S1063785019020032
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DOI: https://doi.org/10.1134/S1063785019020032