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Properties of contact coatings based on ruthenium nanofilms for MEMS switches

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Abstract

Switching properties of contact coatings based on ruthenium nanofilms obtained by electrochemical deposition have been studied. The laws of variation of the contact resistance as a function of the number of switching cycles are established as dependent on the coating thickness and surface roughness. Optimum parameters of contact coatings are determined that ensure minimum contact resistance of switches for micro-electromechanical systems (MEMS) operating in steady-state regimes.

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References

  1. M. Vincent, L. Chiesi, J. C. Fourrier, A. Garnier, B. Grappe, C. Lapiere, C. Coutier, A. Samperio, and S. Paineau, Proceedings of the 54th IEEE Holm Conference (October 27–29, 2008, Orlando), pp. 145–150.

  2. C. Coutier, L. Chiesi, A. Garnier, J. C. Fourrier, C. Lapière, M. Trouillon, B. Grappe, M. Vincent, A. Samperio, S. Borel, C. Dieppedale, E. Lorent, and H. Sibuet, Proceedings of the 15th Int. Conf. on Transducers (June 21–25, 2009, Denver), pp. 861–864.

  3. S. M. Karabanov, A. S. Karabanov, D. V. Suvorov, B. N. Sazhin, A. A. Krutilin, B. Grappe, C. Coutier, and H. Sibuet, Elektron. Prom-st, No. 4, 51 (2009).

    Google Scholar 

  4. K. A. Arushanov, M. N. Drozdov, S. M. Karabanov, I. A. Zeltser, and A. Tolstogouzov, Appl. Surf. Sci. 265, 642 (2013).

    Article  ADS  Google Scholar 

  5. S. M. Karabanov and O. G. Lokshtanova, Electrolytic Coatings for Magnetically Controlled Hermetically Sealed Contacts (Reed Switches) (Ryazan, 2011) [in Russian].

    Google Scholar 

  6. G. P. Gololobov, Atomic force microscopy study of coating surface structure and morphology on magnetically controlled hermetically sealed contacts, Cand. Sci. (Tech.) Dissertation (Ryazan State Radioeng. Univ., Ryazan, 2006).

    Google Scholar 

  7. S. M. Karabanov and O. G. Lokshtanova, Russ. J. Appl. Chem. 81(6), 1000 (2008).

    Article  Google Scholar 

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Authors and Affiliations

  1. Ryazan State Radioengineering University, Ryazan, 390005, Russia

    S. M. Karabanov, N. A. Verlov, D. V. Suvorov, G. P. Gololobov & E. V. Slivkin

Authors
  1. S. M. Karabanov
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  2. N. A. Verlov
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  3. D. V. Suvorov
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  4. G. P. Gololobov
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  5. E. V. Slivkin
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Corresponding author

Correspondence to D. V. Suvorov.

Additional information

Original Russian Text © S.M. Karabanov, N.A. Verlov, D.V. Suvorov, G.P. Gololobov, E.V. Slivkin, 2015, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2015, Vol. 41, No.14, pp. 56–63.

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Karabanov, S.M., Verlov, N.A., Suvorov, D.V. et al. Properties of contact coatings based on ruthenium nanofilms for MEMS switches. Tech. Phys. Lett. 41, 691–693 (2015). https://doi.org/10.1134/S1063785015070226

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  • DOI: https://doi.org/10.1134/S1063785015070226

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