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Reflection electron-energy-loss spectroscopy of Fe x Si1 − x thin films

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Abstract

The values of the product of the inelastic mean free path and the differential cross section for inelastic scattering of electrons have been determined from the reflection electron-energy-loss spectra of thin films of the Fe x Si1 − x system (0 ≤ x ≤ 1). A new approach to the quantitative analysis of components in such composite media is proposed.

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Original Russian Text © A.S. Parshin, G.A. Alexandrova, A.E. Dolbak, O.P. Pchelyakov, B.Z. Ol’shanetskiĭ, S.G. Ovchinnikov, S.A. Kushchenkov, 2008, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2008, Vol. 34, No. 9, pp. 41–48.

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Parshin, A.S., Alexandrova, G.A., Dolbak, A.E. et al. Reflection electron-energy-loss spectroscopy of Fe x Si1 − x thin films. Tech. Phys. Lett. 34, 381–383 (2008). https://doi.org/10.1134/S1063785008050064

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  • DOI: https://doi.org/10.1134/S1063785008050064

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