Abstract
An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes.
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Original Russian Text © E.V. Khaydukov, O.A. Novodvorsky, A.A. Lotin, V.V. Rocheva, O.D. Khramova, V.Ya. Panchenko, 2010, published in Zhurnal Tekhnicheskoĭ Fiziki, 2010, Vol. 80, No. 4, pp. 59–63.
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Khaydukov, E.V., Novodvorsky, O.A., Lotin, A.A. et al. Probe studies of laser erosion plume arising at silicon ablation in vacuum. Tech. Phys. 55, 491–495 (2010). https://doi.org/10.1134/S1063784210040092
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DOI: https://doi.org/10.1134/S1063784210040092