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Analysis of Carbon and Carbon-Containing Materials by X-Ray Photoelectron Spectroscopy

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Abstract

The results of the analysis of carbon-containing materials are presented based on an analysis of the peaks of X-ray photoelectron spectroscopy (XPS) formed by the electrons leaving the analyzed sample in a vacuum without energy loss (peak shape analysis, PSA) and based on the interpretation of the widest possible area of energy loss adjacent to the photoelectron spectroscopy (PES) peak. It is shown that the PES analysis of diamond-like materials containing alloying additives, the concentration of which is comparable with the concentration of carbon, is not effective. The PES analysis of graphene oxide samples that were heat-treated to remove oxygen gave detailed information about the laws of the energy loss of photoelectrons emitted from the 1s level, which determines the allotropic variety of carbon.

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Funding

The work was carried out as part of state assignment 3.1414.2017/PCh.

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Authors and Affiliations

  1. National Research University MPEI, 111250, Moscow, Russia

    V. P. Afanas’ev, A. I. Popov, A. D. Barinov, Yu. N. Bodisko, G. S. Bocharov, A. S. Gryazev, A. V. Eletskii, P. S. Kaplya, I. N. Miroshnikova & O. Yu. Ridzel’

  2. Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences, 119991, Moscow, Russia

    A. I. Popov, A. D. Barinov & I. N. Miroshnikova

Authors
  1. V. P. Afanas’ev
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  2. A. I. Popov
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  3. A. D. Barinov
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  4. Yu. N. Bodisko
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  5. G. S. Bocharov
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  6. A. S. Gryazev
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  7. A. V. Eletskii
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  8. P. S. Kaplya
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  9. I. N. Miroshnikova
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  10. O. Yu. Ridzel’
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Corresponding author

Correspondence to V. P. Afanas’ev.

Additional information

Abbreviation: XPS, X-ray photoelectron spectroscopy; REELS, reflection electron energy loss spectroscopy; RES, reflected electron spectroscopy; PSA, peak shape analysis; PES, photoelectron spectroscopy; CVD, chemical vapor deposition; PPMS, polyphenylmethylsiloxane; ELF, energy loss functions; DIIMFP, differential inverse inelastic mean free path.

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Afanas’ev, V.P., Popov, A.I., Barinov, A.D. et al. Analysis of Carbon and Carbon-Containing Materials by X-Ray Photoelectron Spectroscopy. Russ Microelectron 49, 47–54 (2020). https://doi.org/10.1134/S1063739720010035

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  • DOI: https://doi.org/10.1134/S1063739720010035

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