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Positronics and nanotechnologies: Possibilities of studying nanoobjects in critical engineering materials using positron annihilation spectrometry

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Abstract

It is shown that positron annihilation spectroscopy (PAS) is one of the efficient methods for determining the sizes of nanodefects (vacancies, vacancy clusters); free volumes of pores; cavities, and voids; their concentrations and the chemical composition at the annihilation site (location) in nanomaterials and other critical engineering materials. A brief review of experimental studies of nanodefects in porous silicon, silicon, and quartz monocrystal irradiated by protons as well as quartz powders are given.

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Authors and Affiliations

  1. Alikhanov Institute of Theoretical and Experimental Physics, Bol’shaya Cheremushkinskaya ul. 25, Moscow, 117259, Russia

    V. I. Grafutin, E. P. Prokop’ev & Yu. V. Funtikov

  2. Moscow State Institute of Electronic Engineering (Technical University), Zelenograd, Moscow oblast, 103498, Russia

    S. P. Timoshenkov & S. S. Evstaf’ev

Authors
  1. V. I. Grafutin
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  2. E. P. Prokop’ev
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  3. S. P. Timoshenkov
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  4. S. S. Evstaf’ev
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  5. Yu. V. Funtikov
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Correspondence to V. I. Grafutin.

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Original Russian Text © V.I. Grafutin, E.P. Prokop’ev, S.P. Timoshenkov, S.S. Funtikov, 2009, published in Mikroelektronika, 2009, Vol. 38, No. 6, pp. 464–475.

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Grafutin, V.I., Prokop’ev, E.P., Timoshenkov, S.P. et al. Positronics and nanotechnologies: Possibilities of studying nanoobjects in critical engineering materials using positron annihilation spectrometry. Russ Microelectron 38, 418–428 (2009). https://doi.org/10.1134/S1063739709060079

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  • DOI: https://doi.org/10.1134/S1063739709060079

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