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Method for the Fabrication of Biochips

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Abstract

A new method for manufacturing a stamp or a mold, which differs from well-known LIGA technology, is described. They can be used to mold biochips of various plastics. A typical sequence of operations in LIGA technology is as follows: the formation of a thick resistive mask by deep X-ray lithography, the creation of a stamp (or mold) by galvanoplasty and the fabrication of plastic products using a stamp (or mold). This report describes a different sequence of operations: the formation of a thick resistive mask by deep photolithography on the working surface of the blank of a stamp (or a mold), the creation of a stamp relief by plasma chemical etching through a resistive mask, and the stamping (or molding) of plastic products, using the resulting stamp (or mold). A new method for the polymerization of plexiglass from electron-irradiated methyl methacrylate (MMA) prepolymer is also described. It has advantages over polymerization methods using benzoyl peroxide as the initiator of polymerization, because it expands the spectral range of transparency of the resulting plexiglass. This makes it possible to combine biochips produced by this technology with laser-induced fluorescence to detect analyzed samples in a wider spectral range.

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ACKNOWLEDGMENTS

The equipment of the Siberian Synchrotron and Terahertz Radiation Centre (SSTRC) was used.

Funding

This work was completed in terms of the Russian Federation Government task of the Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch, Russian Academy of Sciences (project no. 0237-2019-0001).

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Authors and Affiliations

  1. Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia

    A. N. Gentselev, A. V. Varand & V. I. Kondratyev

  2. Novosibirsk State University, 630090, Novosibirsk, Russia

    F. N. Dultsev

  3. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia

    F. N. Dultsev

  4. Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch, Russian Academy of Sciences, 630128, Novosibirsk, Russia

    A. V. Varand

Authors
  1. A. N. Gentselev
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  2. F. N. Dultsev
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  3. A. V. Varand
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  4. V. I. Kondratyev
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Corresponding author

Correspondence to A. N. Gentselev.

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Translated by P. Vlasov

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Gentselev, A.N., Dultsev, F.N., Varand, A.V. et al. Method for the Fabrication of Biochips. J. Surf. Investig. 14, 1403–1409 (2020). https://doi.org/10.1134/S1027451020060300

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  • DOI: https://doi.org/10.1134/S1027451020060300

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