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Atomic-Force Microscopy in the Study of the Tribological Characteristics of Thin Al−Si−N Coatings

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Abstract

Results of the atomic-force microscopic determination of the surface microstructure and roughness, friction forces and coefficients of nanocrystalline AlSiN films in the initial state and after annealing are presented. A procedure is proposed to determine the friction coefficients by atomic-force microscopy with multi-pass scanning. The dependences of the friction coefficients on the number of passes are obtained. A significant effect of annealing on a decrease in the friction coefficients of AlSiN films is detected.

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ACKNOWLEDGMENTS

The work was supported by the State Programs of Scientific Research “Energy Systems, Processes, and Technologies” of the Subprogram “Efficient Thermophysical Processes and Technologies” of the National Academy of Sciences of Belarus.

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Authors and Affiliations

  1. A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus, 220072, Minsk, Belarus

    T. A. Kuznetsova, T. I. Zubar, V. A. Lapitskaya, K. A. Sudilovskaya & S. A. Chizhik

  2. Belarusian State University, 220030, Minsk, Belarus

    V. V. Uglov, V. I. Shimanskii & N. T. Kvasov

Authors
  1. T. A. Kuznetsova
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  2. T. I. Zubar
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  3. V. A. Lapitskaya
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  4. K. A. Sudilovskaya
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  5. S. A. Chizhik
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  6. V. V. Uglov
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  7. V. I. Shimanskii
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  8. N. T. Kvasov
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Corresponding author

Correspondence to T. A. Kuznetsova.

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Translated by L. Chernikova

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Kuznetsova, T.A., Zubar, T.I., Lapitskaya, V.A. et al. Atomic-Force Microscopy in the Study of the Tribological Characteristics of Thin Al−Si−N Coatings. J. Surf. Investig. 13, 36–40 (2019). https://doi.org/10.1134/S1027451019010117

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  • DOI: https://doi.org/10.1134/S1027451019010117

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