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Mass-spectrometric study of tellurium-film condensation and evaporation on sapphire

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Abstract

The processes of the condensation and evaporation of a tellurium film produced by a molecular beam of Te2 on a sapphire surface are studied. It is experimentally shown that the desorption of tellurium from a surface upon growth under nonequilibrium conditions exceeds the equilibrium thermal desorption. If the beam intensity is less than the equilibrium value, then desorption is also lower than the equilibrium value. A model of this process with allowance for the transient states of tellurium in the adsorption layer is proposed. Within this model equilibrium and Langmuir beams are expressed in terms of the process parameters. The reflection coefficient of the beam is also a function of the process characteristics. The experimental data make it possible to estimate some of the basic parameters of the process, including the coverage and desorption rate in the adsorption layer. Taking these results into account is important for manufacturing perfect films not only of Te, but also of CdTe.

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Authors and Affiliations

  1. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Moscow, Russia

    V. I. Mikhailov, L. E. Polyak, V. M. Kanevsky & A. S. Pisarev

Authors
  1. V. I. Mikhailov
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  2. L. E. Polyak
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  3. V. M. Kanevsky
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  4. A. S. Pisarev
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Additional information

Original Russian Text © V.I. Mikhailov, L.E. Polyak, V.M. Kanevsky, A.S. Pisarev, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 4, pp. 5–8.

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Mikhailov, V.I., Polyak, L.E., Kanevsky, V.M. et al. Mass-spectrometric study of tellurium-film condensation and evaporation on sapphire. J. Surf. Investig. 8, 308–311 (2014). https://doi.org/10.1134/S1027451014020384

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  • DOI: https://doi.org/10.1134/S1027451014020384

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