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Resolution of a scanning electron microscope: 1. Current state of the problem

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Abstract

Known methods for determining the resolution of a scanning electron microscope are discussed. It is shown that none of them can unambiguously characterize the scanning electron microscope.

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Authors and Affiliations

  1. A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow, Russia

    Yu. A. Novikov

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  1. Yu. A. Novikov
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Original Russian Text © Yu.A. Novikov, 2013, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2013, No. 5, pp. 105–112.

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Novikov, Y.A. Resolution of a scanning electron microscope: 1. Current state of the problem. J. Surf. Investig. 7, 497–504 (2013). https://doi.org/10.1134/S1027451013030105

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  • DOI: https://doi.org/10.1134/S1027451013030105

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