Skip to main content
SpringerLink
Log in

Polymerization of SU-8 under irradiation stimulated by temperature increase

  • Proceedings of XVIII International Conference on the Application of Synchrotron Radiation SR-2010 (Budker INP SB RAS, Novosibirsk, Russia)
  • Published:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques Aims and scope Submit manuscript

Abstract

X-ray irradiation of thick polymer layers (a deep X-ray lithography procedure) results in a temperature distribution over the exposed area. The induced inhomogeneous temperature increase can reach several tens of degrees and it affects direct SU-8 polymerization depending on the microstructure size and area.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. A. El-Kholi, J. Mohr, and V. Nazmov, Nucl. Instrum. Methods Phys. Res. A 448, 497 (2000).

    Article  CAS  Google Scholar 

  2. V. P. Naz’mov, L. A. Mezentseva, V. F. Pindyurin, and V. E. Istomin, Poverkhnost’, No. 3, 10 (2001).

  3. http://www.microchem.com

  4. V. Nazmov, L. Shabel’nikov, F. J. Pantenburg, et al., Nucl. Instrum. Methods Phys. Res. B 217, 409 (2004).

    Article  CAS  Google Scholar 

  5. G. N. Dul’nev and E. M. Semyashkin, Heat Transfer in Radioelectronic Devices (Energiya, Moscow, 1968) [in Russian].

    Google Scholar 

  6. E. Mertzel and J. L. Koenig, Adv. Polym. Sci. 75, 74 (1986).

    Google Scholar 

  7. M. Stewart, M. Somervell, H. Tran, et al., Proc. SPIE 3999, 665 (2000).

    Article  CAS  Google Scholar 

  8. V. Nazmov, V. Pindyurin, S. Mishnev, and E. Yakovleva, Nucl. Instrum. Methods Phys. Res. B 173, 311 (2001).

    Article  CAS  Google Scholar 

  9. V. Nazmov, J. Mohr, and E. Reznikova, Nucl. Instrum. Methods. Phys. Res. A 603, 153 (2009).

    Article  CAS  Google Scholar 

  10. M. L. Williams, R. F. Landel, and J. D. Ferry, J. Am. Chem. Soc. 77, 3701 (1955).

    Article  CAS  Google Scholar 

  11. A. N. Tikhonov and A. A. Samarskii, Equations of Mathematical Physics (Nauka, Moscow, 1977) [in Russian].

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute for Microstructure Technology/Karlsruhe Institute of Technology, Karlsruhe, 76021, Germany

    V. Naz’mov & M. Berger

  2. Institute of Functional Interfaces/Karlsruhe Institute of Technology, Karlsruhe, 7602, Germany

    S. Heissler

Authors
  1. V. Naz’mov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Berger
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. Heissler
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Original Russian Text © V. Naz’mov, M. Berger, S. Heissler, 2011, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2011, No. 11, pp. 3–7.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Naz’mov, V., Berger, M. & Heissler, S. Polymerization of SU-8 under irradiation stimulated by temperature increase. J. Surf. Investig. 5, 1023–1027 (2011). https://doi.org/10.1134/S1027451011110139

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1027451011110139

Keywords

Search

Navigation