Abstract
The surface topography of silicon and germanium single crystals formed under 10-keV Ar+ and Ne+ irradiation was studied experimentally. A relief with typical nanometer-scale dimensions is detected using atomic-force microscopy. It is established that the average height of the nanorelief formed depends on the silicon doping levels. It is also shown that the average height is determined by the parameters of ion irradiation.
Similar content being viewed by others
References
F. Vasiliu, A. Teodorescu, and F. Glodeanu, J. Mater. Sci. 10, 399 (1975).
S. Rusponi, C. Boragno, and U. Valbusa, Phys. Rev. Lett. 78, 2795 (1997).
E. Chason, T. M. Mayer, B. K. Kellerman, et al., Phys. Rev. Lett. 72, 3040 (1994).
T. M. Mayer, E. Chason, and A. J. Howard, J. Appl. Phys. 76, 1633 (1994).
G. Carter and V. Vishnyakov, Phys. Rev. B 54, 17647 (1996).
S. Facsko, T. Dekorsy, C. Koerdt, et al., Science 285, 1551 (1999).
R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Tech 6, 2390 (1988).
Sputtering by Particle Bombardment: Physical Sputtering of Single-Element Solids, Ed. by R. Berish (Mir, Moscow, 1984; Springer, Berlin, 1981).
R. Gago, L. Vazquez, R. Cuerno, et al., Appl. Phys. Lett. 78, 3316 (2001).
A. Cuenat and M. J. Aziz, Mat. Res. Soc. Symp. Proc. 696 (2002).
A. A. Andreev, V. I. Bachurin, S. P. Linnik, and V. S. Chernysh, Secondary Ion and Ion-Photon Emission (Kharkov Gos. Univ., Kharkov, 1983), p. 305 [in Russian].
A. S. Artemov, Fiz. Tverd. Tela 46, 670 (2004) [Phys. Solid State 46, 687 (2004)].
N. Matsunami, Y. Yamamura, Y. Itikawa, et al., Energy Dependence of Sputtering Yields of Monatomic Solids (Inst. of Plasma Phys., Nagoya Univ. Chikusa-ku, Nagoya, 1980), p. 40.
B. Kahng, H. Jeong, and A.-L. Barabasi, Appl. Phys. Lett. 78, 805 (2001).
R. Gago, L. Vazquez, R. Cuerno, et al., Nanotecnology 13, 304 (2002).
J. Erlebacher, M. J. Aziz, E. Chason, et al., Phys. Rev. Lett. 82, 2330 (1999).
J. Erlebacher, M. J. Aziz, E. Chason, et al., J. Vac. Sci. Technology A 18, 115 (2000).
V. V. Bolotov, G. N. Kamaev, and L. S. Smirnov, Fiz. Tekh. Poluprovodn. 36, 385 (2002) [Semiconductors 36, 385 (2002)].
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © V.S. Chernysh, A.S. Patrakeev, E.S. Soldatov, D.V. Petrov, S.V. Alyshev, 2007, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 12, pp. 25–29.
Rights and permissions
About this article
Cite this article
Chernysh, V.S., Patrakeev, A.S., Soldatov, E.S. et al. Nanorelief formation under ion irradiation of germanium and silicon surfaces. J. Surf. Investig. 1, 717–721 (2007). https://doi.org/10.1134/S1027451007060171
Received:
Issue Date:
DOI: https://doi.org/10.1134/S1027451007060171