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Thermodynamic Study of a Volatile Complex of Magnesium Benzoyltrifluoroacetonate with N,N,N',N'-Tetramethylethylenediamine

  • SYNTHESIS AND PROPERTIES OF INORGANIC COMPOUNDS
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Abstract

To expand the library of volatile magnesium precursors certified for effective use in chemical gas-phase deposition of the corresponding oxide or fluoride layers, a thermodynamic study of the mixed ligand complex Mg(tmeda)(btfac)2 (tmeda is N,N,N',N'-tetramethylethylenediamine, btfac is benzoyl trifluoroacetonate) have been performed. The melting process has been studied using DSC (Tm = 459.4 ± 0.3 K, \({{\Delta }_{{\text{m}}}}H_{{4594}}^{^\circ }\) = 42.9 ± 0.4 kJ/mol); the sublimation process has been studied using the flow (transfer) method in the temperature range 407–447 K (\({{\Delta }_{{{\text{subl}}}}}H_{{427}}^{^\circ }\) = 163 ± 6 kJ/mol, ΔsublS427 = 293 ± 14 J/(mol K)). The substance passes into the gas phase with partial decomposition. Thermodynamic modeling of the composition of condensed phases formed from Mg(tmeda)(btfac)2 with the addition of H2 or O2 has been performed depending on the temperature (700–1300 K), total pressure (133–13 332 Pa), and the ratio of the reagent gas to the precursor (0–300). The data obtained can be used to determine the experimental parameters of the processes for obtaining functional layers. Comparison of the results with a similar trifluoroacetylacetonate complex made it possible to quantitatively reveal the effect of replacing the methyl group in the anionic ligand with a phenyl one.

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ACKNOWLEDGMENTS

The authors are grateful to the Chemical Research Center for Collective Use of the Siberian Branch of the Russian Academy of Sciences (Novosibirsk Institute of Organic Chemistry, Siberian Branch, RAS) for elemental analysis studies and the Center for Collective Use of the Nikolaev Institute of Inorganic Chemistry of the Siberian Branch of the Russian Academy of Sciences for recording NMR spectra and diffraction patterns (State Assignment of the Nikolaev Institute of Chemistry of the Siberian Branch of the Russian Academy of Sciences, projects nos. 121031700314-5 and 121031700313-8).

Funding

This work was supported by the Russian Science Foundation, project no. 21-73-00252.

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Authors and Affiliations

  1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia

    E. S. Vikulova, S. V. Sysoev, A. V. Sartakova, E. A. Rikhter, A. A. Nazarova, L. N. Zelenina & N. B. Morozova

  2. Novosibirsk State University, 630090, Novosibirsk, Russia

    A. V. Sartakova, E. A. Rikhter & V. A. Rogov

  3. Boreskov Institute of Catalysis, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia

    V. A. Rogov

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  1. E. S. Vikulova
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  2. S. V. Sysoev
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  3. A. V. Sartakova
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  4. E. A. Rikhter
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Correspondence to E. S. Vikulova.

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Translated by V. Avdeeva

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Vikulova, E.S., Sysoev, S.V., Sartakova, A.V. et al. Thermodynamic Study of a Volatile Complex of Magnesium Benzoyltrifluoroacetonate with N,N,N',N'-Tetramethylethylenediamine. Russ. J. Inorg. Chem. 68, 133–139 (2023). https://doi.org/10.1134/S003602362260232X

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