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Generalized Null-Ellipsometry in the Polarizer–Sample–Analyzer Scheme

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Abstract

The null ellipsometry technique of generalized ellipsometry based on using a compensator-free polarizer–sample–analyzer scheme for the case of incidence of an s- or p-polarized light on an anisotropic system is analyzed. Analytical expressions establishing a relation between measured angular quantity (analyzer azimuth at minimum intensity of detected radiation) and elements of the (2 × 2) anisotropic Jones matrix are derived. The dependence of this angular quantity on sample orientation (azimuth) is proposed to be used for determining optic-geometrical parameters of studied anisotropic systems. Sensitivity of the proposed method is estimated and is found to be comparable with that of the polarizer–compensator–sample–analyzer scheme. A comparative analysis of the discussed method with the well-known photometric method of generalized ellipsometry in the polarizer–sample–analyzer scheme based on measurement of the dependence of reflected-light intensity on sample azimuth at fixed polarizer and analyzer positions is presented. It is estimated that an error of a single arc minute in the proposed method and a relative error of determining the energy reflection coefficient of 0.05% in the photometric method of the generalized ellipsometry correspond to the same sensitivity.

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Authors and Affiliations

  1. Lashkarev Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, 03028, Kiev, Ukraine

    M. V. Sopinskyy & G. P. Ol’khovik

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  1. M. V. Sopinskyy
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  2. G. P. Ol’khovik
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Correspondence to M. V. Sopinskyy.

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Translated by I. Shumay

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Sopinskyy, M.V., Ol’khovik, G.P. Generalized Null-Ellipsometry in the Polarizer–Sample–Analyzer Scheme. Opt. Spectrosc. 130, 92–101 (2022). https://doi.org/10.1134/S0030400X22010155

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