Skip to main content
SpringerLink
Log in

The Design and Characteristics of a 630-mm Phase-Shifting Interferometer

  • General Experimental Techniques
  • Published:
Instruments and Experimental Techniques Aims and scope Submit manuscript

Abstract

A large-aperture Fizeau interferometer has been developed for measuring the characteristics of optical elements with flat surfaces. The interferometer has two fields of view with dimensions of 630 and 100 mm and with transverse resolutions of 0.63 and 0.1 mm/pixel, respectively. Due to the calibration of the reference plates, the absolute measurement accuracy of the interferometer is λ/1000 RMS (λ = 632.8 nm) on a 630-mm field of view.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Spero, R.E. and Withcomb, S.E., Opt. Photonics News, 1995, vol. 6, no. 7, p. 35. doi 10.1364/OPN.6.7.000035

    Article  ADS  Google Scholar 

  2. Hogan, W.J., Moses, E.I., Warner, B.E., Sorem, M.S., and Soures, J.M., Nucl. Fusion, 2001, vol. 41, no. 5, p. 567. doi 10.1088/0029-5515/41/5/309

    Article  ADS  Google Scholar 

  3. Ai, C., Knowlden, R., and Lamb, J., Proc. SPIE, 1997, vol. 3134, p. 447. doi 10.1117/12.295145

    Article  ADS  Google Scholar 

  4. Desk, L.L. and Soobitsky, J.A., Proc. SPIE, 1999, vol. 3782, p. 432. doi 10.1117/12.369221

    Article  ADS  Google Scholar 

  5. Gorelik, G.S., Dokl. Akad. Nauk SSSR, 1952, vol. 83, p. 549.

    Google Scholar 

  6. Creath, K., Prog. Opt., 1989, vol. 26, p. 349.

    Article  Google Scholar 

  7. Okada, K., Sato, A., and Tsujiuchi, J., Opt. Commun., 1991, vol. 84, p. 118. doi 10.1016/0030-4018(91)90212-V

    Article  ADS  Google Scholar 

  8. Fritz, B.S., Opt. Eng., 1984, vol. 23, p. 379. doi 10.1117 /12.7973304

    Article  ADS  Google Scholar 

  9. Grzanna, J. and Schulz, G., Opt. Commun., 1990, vol. 77, p. 107. doi 10.1016/0030-4018(90)90417-R

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Federal Research Center, Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod, 603950, Russia

    D. E. Silin, I. E. Kozhevatov, E. H. Kulikova, A. V. Pigasin & S. B. Speransky

  2. Russian Federal Nuclear Center, All-Russia Research Institute of Experimental Physics, Sarov, Nizhny Novgorod oblast, 607188, Russia

    S. A. Bel’kov, I. N. Derkach, D. I. Lobachev & I. E. Chernov

Authors
  1. D. E. Silin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. I. E. Kozhevatov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. E. H. Kulikova
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. V. Pigasin
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. S. B. Speransky
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. S. A. Bel’kov
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. I. N. Derkach
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. D. I. Lobachev
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. I. E. Chernov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to D. E. Silin.

Additional information

Original Russian Text © D.E. Silin, I.E. Kozhevatov, E.H. Kulikova, A.V. Pigasin, S.B. Speransky, S.A. Bel’kov, I.N. Derkach, D.I. Lobachev, I.E. Chernov, 2018, published in Pribory i Tekhnika Eksperimenta, 2018, No. 3, pp. 83–90.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Silin, D.E., Kozhevatov, I.E., Kulikova, E.H. et al. The Design and Characteristics of a 630-mm Phase-Shifting Interferometer. Instrum Exp Tech 61, 393–399 (2018). https://doi.org/10.1134/S0020441218020215

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0020441218020215

Search

Navigation