Abstract
A POLYION-1M automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method is described. The design, the scheme of connection with a computer, and software of the setup are described. The results of comparison of the parameters of the setup developed and its foreign analog are analyzed. Nanodimensional films with a varied number of layers on silicon substrates were produced. The refractive index and thickness of films were determined by the ellipsometry technique.
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Original Russian Text © S.A. Portnov, A.M. Yashchenok, A.S. Gubskii, D.A. Gorin, A.A. Neveshkin, B.N. Klimov, A.A. Nefedov, and M.V. Lomova, 2006, published in Pribory i Tekhnika Eksperimenta, 2006, No. 6, pp. 115–120.
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Portnov, S.A., Yashchenok, A.M., Gubskii, A.S. et al. An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method. Instrum Exp Tech 49, 849–854 (2006). https://doi.org/10.1134/S0020441206060157
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DOI: https://doi.org/10.1134/S0020441206060157