Abstract
Thermalization of the energetic atoms emitted by a target at pressures up to 100 Pa causes heating and motion of the gaseous medium. The temperature and velocity of the gas have been measured as a function of the magnetron-discharge parameters. This paper presents the dependences of the deposition rate, the thickness profile, and the film structure on the pressure and the discharge power. It shows that they are well described by a simple diffusion model of the transport of the thermalized atoms of the target that takes into account the motion and heating of the gaseous medium.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
R. E. Somekh, J. Vac. Sci. Technol. A 2, 1285 (1984).
J. M. Harper, J. J. Cuomo, R. J. Gambino et al., J. Vac. Sci. Technol. 15, 1597 (1978).
C. T. Eom, J. M. Phillips, and R. J. Cava, Mater. Res. Soc. Symp. Proc. 341, 229 (1994).
Th. Schurig, S. Menkel, Z. Quan et al., Physica C 262, 89 (1996).
A. M. Myers, J. R. Doyle, J. R. Abelson et al., J. Vac. Sci. Technol. A 9, 614 (1991).
F. A. Chudnovskii, B. Sh. Elkin, A. A. Fursenko et al., in Proceedings of the Third German-Soviet Bilateral Seminar on High-Temperature Superconductivity, Karlsruhe, 1990, pp. 451–457.
J. A. Valles-Abarca and A. Gras-Marti, J. Appl. Phys. 55, 1370 (1984).
A. G. Zhiglinsky, A. M. Izmailov, V. V. Kuchinsky et al., Izv. Vyssh. Uchebn. Zaved. Fiz. 25, 869 (1982).
A. G. Zhiglinsky and V. V. Kuchinsky, Mass Transfer in the Interaction of a Plasma with a Surface [in Russian] (Énergoizdat, Moscow, 1991), 206 pp.
I. Petrov, I. Ivanov, V. Orlinov et al., J. Vac. Sci. Technol. A 11, 2733 (1993).
S. M. Rossnagel, J. Vac. Sci. Technol. A 6, 19 (1988).
S. M. Rossnagel, IEEE Trans. Plasma Sci. PS-18, 878 (1990).
D. W. Hoffman, J. Vac. Sci. Technol. A 3, 561 (1985).
I. D. Morozov, L. I. Trusov, and V. N. Lapovok, Physical Phenomena in Ultradisperse Media (Énergoizdat, Moscow, 1984), 372 pp.
L. D. Landau and E. M. Lifshitz, Fluid Mechanics [Pergamon Press, Oxford, 1987; Nauka, Moscow, 1988, 736 pp.].
H. von Schlichting, Grenzschicht-Theorie [Verlag G. Braun, Karlsruhe; Nauka, Moscow, 1974, 480 pp.].
W. D. Westwood, J. Vac. Sci. Technol. 15, 1 (1978).
R. S. Robinson, J. Vac. Sci. Technol. 16, 185 (1979).
R. A. Brizzolara, C. B. Cooper, and T. K. Olson, Nucl. Instrum. Methods 35, 36 (1988).
Y. Okabe, M. Sasao, M. Wada et al., Jpn. J. Appl. Phys. 30, L1428 (1991).
K. Sakuta, Y. Sakaguchi, T. Awaji et al., IEICE Trans. E74, 1960 (1991).
R. Behrisch, Ed., Sputtering by Particle Bombardment I., vol. 47 of Applied Physics [Springer, Berlin, 1981; Mir, Moscow, 1984].
V. N. Kondrat’ev and B. E. Nikitin, The Kinetics and Mechanism of Vapor-Phase Reactions (Nauka, Moscow, 1974), 558 pp.
Author information
Authors and Affiliations
Additional information
Zh. Tekh. Fiz. 68, 24–32 (July 1998)
Rights and permissions
About this article
Cite this article
Znamenskii, A.G., Marchenko, V.A. High-pressure magnetron sputtering: Gas-phase processes. Tech. Phys. 43, 766–773 (1998). https://doi.org/10.1134/1.1259071
Received:
Issue Date:
DOI: https://doi.org/10.1134/1.1259071