Abstract
It is established that the addition of hydrogen to methane in the reaction mixture upon the fabrication of diamond-like carbon films via the plasma-enhanced chemical vapor deposition method decreases residual stresses in the obtained films and significantly reduces their growth rate. The films were investigated via atomic force microscopy, Raman spectroscopy, and X-ray photoelectron spectroscopy. Irradiation of the prepared films with P+ and PF +4 ions results in strong sample swelling with increasing dose, as well as in a decrease in the compressive stress up to transition to tensile one reaching saturation. Moreover, the fraction of sp 3 bonds increases with increasing ion dose while the fraction of sp 2 bonds decreases symmetrically with the processes proceeding faster upon irradiation with molecular ions. Qualitative mechanisms explaining the experimental results are proposed.
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Original Russian Text © P.A. Karaseov, O.A. Podsvirov, A.I. Titov, K.V. Karabeshkin, A.Ya. Vinogradov, V.S. Belyakov, A.V. Arkhipov, L.M. Nikulina, A.L. Shakhmin, E.N. Shubina, N.N. Karasev, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 1, pp. 49–53.
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Karaseov, P.A., Podsvirov, O.A., Titov, A.I. et al. Effect of ion bombardment on the phase composition and mechanical properties of diamond-like carbon films. J. Surf. Investig. 8, 45–49 (2014). https://doi.org/10.1134/S1027451013060098
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DOI: https://doi.org/10.1134/S1027451013060098