Skip to main content
SpringerLink
Log in

Contraction of Microwave Discharge in the Reactor for Chemical Vapor Deposition of Diamond

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

It was found that in a hydrogen-methane mixture in microwave plasma reactor for diamond deposition, there is a threshold pressure after which the contraction of microwave discharge occurs. The results of measurements of gas temperature and spatial distributions of optical emission intensity of discharge are presented. The mechanism of discharge contraction is discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1. (
Fig. 2.
Fig. 3.

Similar content being viewed by others

REFERENCES

  1. R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, and T. P. Mollart, J. Phys.: Condens. Matter 21, 364221 (2009). https://doi.org/10.1088/0953-8984/21/36/364221

    Google Scholar 

  2. Power Electronics Device Applications of Diamond Semiconductors, Ed. by S. Koizumi, H. Umezawa, J. Pernot, and M. Suzuki (Woodhead, Duxford, UK, 2018).

    Google Scholar 

  3. Y. Gu, J. Lu, T. Grotjohn, T. Schuelke, and J. Asmussen, Diamond Relat. Mater. 24, 210 (2012). https://doi.org/10.1016/j.diamond.2012.01.026

    Article  ADS  Google Scholar 

  4. A. B. Muchnikov, A. L. Vikharev, A. M. Gorbachev, D. B. Radishev, V. D. Blank, and S. A. Terentiev, Diamond Relat. Mater 19, 432 (2010). https://doi.org/10.1016/j.diamond.2009.11.012

    Article  ADS  Google Scholar 

  5. M. A. Lobaev, S. A. Bogdanov, D. B. Radishev, A. L. Vikharev, and A. M. Gorbachev, Diamond Relat. Mater. 66, 177 (2016). https://doi.org/10.1016/j.diamond.2016.05.004

    Article  ADS  Google Scholar 

  6. N. Derkaoui, C. Rond, K. Hassouni, and A. Gicquel, J. Appl. Phys. 115, 233301 (2014). https://doi.org/10.1063/1.4883955

    Article  ADS  Google Scholar 

  7. D. G. Goodwin, J. Appl. Phys. 74, 6888 (1993). https://doi.org/10.1063/1.355063

    Article  ADS  Google Scholar 

  8. A. G. Gaydon and H. G. Wolfhard, Proc. R. Soc. London, Ser. A 201, 561 (1950).

    Article  ADS  Google Scholar 

  9. X. Duten, A. Rousseau, A. Gicquel, and P. Leprince, J. Appl. Phys. 86, 5299 (1999). https://doi.org/10.1063/1.371515

    Article  ADS  Google Scholar 

  10. Y. P. Raizer, Gas Discharge Physics (Nauka, Moscow, 1987; Springer, Berlin, Heidelberg, 1991).

  11. A. A. Fridman and L. A. Kennedy, Plasma Physics and Engineering (Taylor and Francis, Routledge, 2004).

    Book  Google Scholar 

  12. A. L. Vikharev, A. M. Gorbachev, and D. B. Radishev, J. Phys. D: Appl. Phys. 52, 014001 (2019). https://doi.org/10.1088/1361-6463/aae3a3

    Article  ADS  Google Scholar 

  13. J. Ma, M. N. R. Ashfold, and Y. A. Mankelevich, J. Appl. Phys. 105, 043302 (2009). https://doi.org/10.1063/1.3078032

    Article  ADS  Google Scholar 

  14. Yu. A. Lebedev and I. L. Epshtein, High Temp. 36, 510 (1998).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia

    S. A. Bogdanov, A. M. Gorbachev, D. B. Radishev, A. L. Vikharev & M. A. Lobaev

Authors
  1. S. A. Bogdanov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. M. Gorbachev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. D. B. Radishev
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. L. Vikharev
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. M. A. Lobaev
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. M. Gorbachev.

Additional information

The article was translated by the authors.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Bogdanov, S.A., Gorbachev, A.M., Radishev, D.B. et al. Contraction of Microwave Discharge in the Reactor for Chemical Vapor Deposition of Diamond. Tech. Phys. Lett. 45, 89–92 (2019). https://doi.org/10.1134/S1063785019020032

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785019020032

Search

Navigation