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Creating Lithographic Pictures Using Faceted Zinc Oxide Microparticles on a Silicon Substrate

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Abstract

Lithography techniques compatible with silicon technology have been developed within the hydrothermal method. Topological layouts were formed by faceted microcrystals with the developed surface. The prospects for implementing new hierarchical structures are of special interest.

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References

  1. Z. Qiang, S. Y. Ma, H. Y. Jiao, W. X. Jin, T. T. Wang, X. H. Jiang, and Z. Y. Zhang, Mater. Lett. 181, 29 (2016).

    Article  Google Scholar 

  2. D. T. Dimitrov, N. K. Nikolaev, K. I. Papazova, L. K. Krasteva, I. A. Pronin, I. A. Averin, A. S. Bojinova, A. Ts. Georgieva, N. D. Yakushova, T. V. Peshkova, A. A. Karmanov, N. V. Kaneva, and V. A. Moshnikov, Appl. Surf. Sci. 392, 95 (2017).

    Article  ADS  Google Scholar 

  3. Y. Jiao, Y. Liu, F. Qu, and X. Wu, Cryst. Eng. Commun. 16, 575 (2014).

    Article  Google Scholar 

  4. R. Jain and R. Pitchumani, Sol. Energy Mater. Sol. Cells 172, 213 (2017).

    Article  Google Scholar 

  5. I. A. Pronin, N. D. Yakushova, D. Ts. Dimitrov, L. K. Krasteva, K. I. Papazova, A. A. Karmanov, I. A. Averin, A. Ts. Georgieva, E. I. Terukov, and V. A. Moshnikov, Tech. Phys. Lett. 43, 825 (2017).

    Article  ADS  Google Scholar 

  6. K. L. Uahabi and M. Atounti, Ann. Univ. Craiova. Math. Comput. Sci. Ser. 42, 167 (2015).

    Google Scholar 

  7. Y. Tian, F. P. García de Arquer, C. T. Dinh, G. Favraud, M. Bonifazi, J. Li, M. Liu, X. Zhang, X. Zheng, G. Kibria, S. Hoogland, D. Sinton, E. H. Sargent, and A. Fratalocchi, Adv. Mater. 29, 1701165 (2017).

    Article  Google Scholar 

  8. V. A. Moshnikov, A. I. Maksimov, O. A. Aleksandrova, I. A. Pronin, A. A. Karmanov, E. I. Terukov, N. D. Yakushova, I. A. Averin, A. A. Bobkov, and N. V. Permyakov, Tech. Phys. Lett. 42, 967 (2016).

    Article  ADS  Google Scholar 

  9. T. V. K. Karthik, L. Martinez, and V. Agarwal, J. Alloys Compd. 731, 853 (2018).

    Article  Google Scholar 

  10. S. S. Karpova, V. A. Moshnikov, S. V. Mjakin, and E. S. Kolovangina, Semiconductors 47, 392 (2013).

    Article  ADS  Google Scholar 

  11. A. A. Bobkov, N. A. Lashkova, A. I. Maximov, V. A. Moshnikov, and S. S. Nalimova, Semiconductors 51, 61 (2017).

    Article  ADS  Google Scholar 

  12. Sh. A. Syuleiman, N. D. Yakushova, I. A. Pronin, N. V. Kaneva, A. S. Bojinova, K. I. Papazova, M. N. Gancheva, D. Ts. Dimitrov, I. A. Averin, E. I. Terukov, and V. A. Moshnikov, Tech. Phys. 62, 1709 (2017).

    Article  Google Scholar 

  13. V. A. Moshnikov, S. S. Nalimova, and B. I. Seleznev, Semiconductors 48, 1499 (2014).

    Article  ADS  Google Scholar 

  14. Yu. M. Spivak, S. V. Myakin, V. A. Moshnikov, M. F. Panov, A. O. Belorus, and A. A. Bobkov, J. Nanomater. 2016, 2629582 (2016).

    Article  Google Scholar 

  15. C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand, and H. Baltes, Nature (London, U.K.) 414, 293 (2001).

    Article  ADS  Google Scholar 

  16. G. Korotcenkov, Mater. Sci. Eng. B 139, 1 (2007).

    Article  Google Scholar 

  17. O. V. Safonova, G. Delabouglise, B. Chenevier, A. M. Gaskov, and M. Labeau, Mater. Sci. Eng. C 21, 105 (2002).

    Article  Google Scholar 

  18. I. A. Pronin, I. A. Averin, N. D. Yakushova, D. T. Dimitrov, L. K. Krasteva, K. I. Papazova, A. S. Chanachev, A. S. Bojinova, A. T. Georgieva, and V. A. Moshnikov, Sens. Actuators, A 206, 88 (2014).

    Article  Google Scholar 

  19. A. A. Bobkov, A. I. Maximov, V. A. Moshnikov, P. A. Somov, and E. I. Terukov, Semiconductors 49, 1357 (2015).

    Article  ADS  Google Scholar 

  20. H. S. Wasly, M. A. El-Sadek, and M. Henini, Appl. Phys. A 124, 76 (2018).

    Article  ADS  Google Scholar 

  21. V. D. Krevchik, M. B. Semenov, and P. V. Krevchik, Izv. Vyssh. Uchebn. Zaved., Povolzh. Reg., Fiz.-Mat. Nauki, No. 1 (41), 92 (2017).

    Google Scholar 

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Authors and Affiliations

  1. Penza State University, Penza, 440026, Russia

    A. A. Bobkov, I. A. Pronin, V. A. Moshnikov, N. D. Yakushova, A. A. Karmanov & I. A. Averin

  2. St. Petersburg State Electrotechnical University LETI, St. Petersburg, 197022, Russia

    A. A. Bobkov, I. A. Pronin, V. A. Moshnikov & P. A. Somov

  3. Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia

    E. I. Terukov

Authors
  1. A. A. Bobkov
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  2. I. A. Pronin
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  3. V. A. Moshnikov
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  4. N. D. Yakushova
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  5. A. A. Karmanov
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  6. I. A. Averin
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  7. P. A. Somov
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  8. E. I. Terukov
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Corresponding author

Correspondence to I. A. Pronin.

Additional information

Original Russian Text © A.A. Bobkov, I.A. Pronin, V.A. Moshnikov, N.D. Yakushova, A.A. Karmanov, I.A. Averin, P.A. Somov, E.I. Terukov, 2018, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2018, Vol. 44, No. 15, pp. 87–92.

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Bobkov, A.A., Pronin, I.A., Moshnikov, V.A. et al. Creating Lithographic Pictures Using Faceted Zinc Oxide Microparticles on a Silicon Substrate. Tech. Phys. Lett. 44, 694–696 (2018). https://doi.org/10.1134/S1063785018080047

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  • DOI: https://doi.org/10.1134/S1063785018080047

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