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Peculiarities of film growth in glow discharge with runaway electrons

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Abstract

We have studied the properties of films deposited in gas discharge with a beam of runaway electrons and observed for the first time an anomalous behavior of the intensity of a probing light beam reflected from a film on substrate upon switching off of the discharge. The observed phenomenon is interpreted in the framework of a two-layer model of the film growth on a substrate, according to which an optically homogeneous surface layer of unknown nature appears on the film during growth in discharge and fully decomposes when the discharge is switched off.

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Authors and Affiliations

  1. Southern Research Center, Russian Academy of Sciences, Rostov-on-Don, 344006, Russia

    S. P. Zinchenko, A. P. Kovtun & G. N. Tolmachev

  2. Southern Federal University, Rostov-on-Don, 344006, Russia

    S. P. Zinchenko, A. P. Kovtun & G. N. Tolmachev

Authors
  1. S. P. Zinchenko
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  2. A. P. Kovtun
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  3. G. N. Tolmachev
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Corresponding author

Correspondence to S. P. Zinchenko.

Additional information

Original Russian Text © S.P. Zinchenko, A.P. Kovtun, G.N. Tolmachev, 2014, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2014, Vol. 40, No. 1, pp. 43–49.

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Zinchenko, S.P., Kovtun, A.P. & Tolmachev, G.N. Peculiarities of film growth in glow discharge with runaway electrons. Tech. Phys. Lett. 40, 21–24 (2014). https://doi.org/10.1134/S1063785014010143

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  • DOI: https://doi.org/10.1134/S1063785014010143

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