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The formation of the (200) and (110) textures in iron films prepared by magnetron sputtering

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Abstract

The effect of working-gas pressure on the texture of iron films on Si(100)/SiO2 substrates prepared by magnetron sputtering at room temperature is studied. It is shown that a change in working-gas pressure from 1.33 to 0.09 Pa leads to a change in the texture of the films from (110) to (200), which is accompanied by transition from a columnar to quasi-homogeneous microstructure of the films. It is found that the surface roughness of the film nonmonotonically depends on working-gas pressure and has a maximum in a pressure range corresponding to the coexistence of phases with the (110) and (200) textures in the film.

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References

  1. Y. Pauleau, S. Kukielka, W. Gulbinski, L. Ortega, and S. N. Dub, J. Phys. D: Appl. Phys. 39, 2803 (2006).

    Article  ADS  Google Scholar 

  2. I. Flis-Kabulska, B. Handke, N. Spiridis, J. Haber, and J. Korecki, Surf. Sci. 507–510, 865 (2002).

    Article  Google Scholar 

  3. S. J. Roosendaal, J. P. Bakker, A. M. Vredenberg, and F. H. Habraken, Surf. Sci. 494, 197 (2001).

    Article  ADS  Google Scholar 

  4. S. Nakagawa and T. Kamiki, J. Magn. Magn. Mater. 287, 204 (2005).

    Article  ADS  Google Scholar 

  5. S. Yuasa, T. Sato, E. Tamura, Y. Suzuki, H. Yamamori, K. Ando, and T. Katayama, Europhys. Lett. 52, 344 (2000).

    Article  ADS  Google Scholar 

  6. S. G. Wang, E. K. Tian, and C. W. Lung, J. Phys. Chem. Solids 61, 1295 (2000).

    Article  ADS  Google Scholar 

  7. H. He, C. L. Zha, B. Ma, Z. Z. Zhang, and Q. Y. Jin, J. Magn. Magn. Mater. 310, 2656 (2007).

    Article  ADS  Google Scholar 

  8. K. Reichelt, Vacuum 38, 1083 (1988).

    Article  Google Scholar 

  9. C. V. Thompson, Annu. Rev. Mater. Sci. 30, 159 (2000).

    Article  ADS  Google Scholar 

  10. R. V. Gol’dshtein, V. A. Gorodtsov, and D. S. Lisovenko, Pis’ma Mater. 1, 127 (2011).

    Google Scholar 

  11. J. Shirakashi and Y. Takemura, J. Magn. Magn. Mater. 272–276, 1581 (2004).

    Article  Google Scholar 

  12. K. Watanabe, Y. Takemura, Y. Shimazu, and J. Shirakashi, Nanotechnology 15, 566 (2004).

    Article  ADS  Google Scholar 

Download references

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Authors and Affiliations

  1. Saratov Branch, Kotel’nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Saratov, 410019, Russia

    A. S. Dzhumaliev, Yu. V. Nikulin & Yu. A. Filimonov

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  1. A. S. Dzhumaliev
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  2. Yu. V. Nikulin
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  3. Yu. A. Filimonov
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Correspondence to A. S. Dzhumaliev.

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Original Russian Text © A.S. Dzhumaliev, Yu.V. Nikulin, Yu.A. Filimonov, 2013, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2013, Vol. 39, No. 21, pp. 10–17.

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Dzhumaliev, A.S., Nikulin, Y.V. & Filimonov, Y.A. The formation of the (200) and (110) textures in iron films prepared by magnetron sputtering. Tech. Phys. Lett. 39, 938–941 (2013). https://doi.org/10.1134/S1063785013110047

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  • DOI: https://doi.org/10.1134/S1063785013110047

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