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Analysis of optical properties of the polyimide film-glass system

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Abstract

Processes of water vapor penetration into the air gap between a polyimide film and a substrate are analyzed using monochromatic zero ellipsometry and multilayer optical models of an organic film-glass substrate system; changes in the optical parameters of this system are detected. Models for water vapor penetration into this interlayer are proposed on the basis of analysis of electron microscopic images of the substrate and film surfaces.

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References

  1. V. N. Fedorinin, Nano-Mikrosist. Tekhn., No. 1, 11 (2005).

  2. L. Z. Kriksunov, A Handbook on Fundamentals of Infrared Technology (Sovetskoe Radio, Moscow, 1978) [in Russian].

    Google Scholar 

  3. A Handbook for Chemists (Khimiya, Leningrad-Moscow, 1966), Vol. 5 [in Russian].

  4. B. M. Ayupov, Optik 109, 145 (1998).

    Google Scholar 

  5. A. V. Rzhanov, K. K. Svitashev, A. I. Semenenko, L. V. Semenenko, and V. K. Sokolov, Principles of Ellipsometry (Nauka, Novosibirsk, 1970) [in Russian].

    Google Scholar 

  6. L. G. Baikova, O. F. Pozdnyakov, V. P. Pukh, V. R. Regel’, and B. P. Redkov, Izv. Akad. Nauk SSSR, Neorg. Mater. 11, 144 (1975).

    Google Scholar 

  7. P. M. Elkhin, Yu. V. Lisitsyn, O. F. Pozdnyakov, and V. V. Yudin, Fiz. Khim. Stekla 12, 611 (1986).

    Google Scholar 

  8. B. M. Ayupov, V. A. Gritsenko, Wong Hei, and C. W. Kim, J. Electrochem. Soc. 153, F277 (2006).

    Article  Google Scholar 

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Authors and Affiliations

  1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrent’eva 3, Novosibirsk, 630090, Russia

    V. V. Bakovets, B. M. Ayupov, V. S. Danilovich & E. A. Maksimovskii

  2. Novosibirsk Branch, Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrent’eva 13, Novosibirsk, 630090, Russia

    V. N. Fedorinin

Authors
  1. V. V. Bakovets
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  2. B. M. Ayupov
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  3. V. S. Danilovich
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  4. E. A. Maksimovskii
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  5. V. N. Fedorinin
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Additional information

Original Russian Text © V.V. Bakovets, B.M. Ayupov, V.S. Danilovich, E.A. Maksimovskii, V.N. Fedorinin, 2009, published in Zhurnal Tekhnicheskoĭ Fiziki, 2009, Vol. 79, No. 12, pp. 64–67.

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Bakovets, V.V., Ayupov, B.M., Danilovich, V.S. et al. Analysis of optical properties of the polyimide film-glass system. Tech. Phys. 54, 1786–1789 (2009). https://doi.org/10.1134/S1063784209120111

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  • DOI: https://doi.org/10.1134/S1063784209120111

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