Skip to main content
SpringerLink
Log in

Investigation into the correlation factor of substrate and multilayer film surfaces by atomic force microscopy

  • Surface and Thin Films
  • Published:
Crystallography Reports Aims and scope Submit manuscript

Abstract

A method for studying the correlations between substrate and film-coating profiles by atomic force microscopy, which makes it possible to calculate the correlation factor (a function of spatial frequency), has been developed. The spatial-frequency range in which the correlation factor can be reliably calculated is established. The method proposed is used to calculate the dependence of the correlation factor on spatial frequency for multilayer interference mirror elements.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M. Li, Y.-P. Zhao, G.-C. Wang, et al., J. Appl. Phys. 83(11), 6287 (1998).

    Article  ADS  Google Scholar 

  2. Y.-P. Zhao, R. M. Gamache, G.-C. Wang, et al., J. Appl. Phys. 89(2), 1325 (2001).

    Article  ADS  Google Scholar 

  3. V. Ng, J. F. Hu, A. O. Adeyeye, et al., J. Appl. Phys. 91(10), 7206 (2002).

    Article  ADS  Google Scholar 

  4. G. Palasantzas and J. Barnas’, Phys. Rev. B 56(12), 7726 (1997).

    Google Scholar 

  5. Y.-P. Zhao, G.-C. Wang, T.-M. Lu, et al., Phys. Rev. B 60(12), 9157 (1999).

    Article  ADS  Google Scholar 

  6. J. M. Benett and L. Mattsson, Introduction to Surface Roughness and Scattering (Opt. Soc. of America, Washington, DC, 1989).

    Google Scholar 

  7. F. Gámiz, J. B. Roldán, P. Cartujo-Cassinello, et al., J. Appl. Phys. 89(3), 1764 (2001).

    Article  ADS  Google Scholar 

  8. M. Trost, S. Schröder, T. Feigl, et al., Apl. Opt. C. 50(9), 148 (2011).

    Article  Google Scholar 

  9. I. V. Kozhevnikov, Nucl. Instrum. Methods Phys. Res. A 498, 482 (2003).

    Article  ADS  Google Scholar 

  10. L. Peverini, E. Ziegler, T. Bigault, et al., Phys. Rev. B 72, 045445 (2005).

    Article  ADS  Google Scholar 

  11. V. V. Azarova, Yu. D. Golyaev, and V. G. Dmitriev, Kvantovaya Elektron. 30(2), 96 (2000).

    Article  Google Scholar 

  12. S. Jakobs, A. Duparré, and H. Truckenbrodt, Appl. Opt. 37, 5583 (1998).

    Article  Google Scholar 

  13. C. Ruppe and A. Duparré, Thin Solid Films 288, 8 (1996).

    Article  ADS  Google Scholar 

  14. V. E. Asadchikov, I. V. Kozhevnikov, Yu. S. Krivonosov, et al., Nucl. Instrum. Methods Phys. Res. A 530, 575 (2004).

    Article  ADS  Google Scholar 

  15. C. Deumié, R. Richier, P. Dumaas, et al., Appl. Opt. 35, 5583 (1996).

    Article  ADS  Google Scholar 

  16. A. Duparré, J. Ferre-Borrull, S. Gliech, et al., Appl. Opt. 41, 154 (2002).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. National Research Centre “Kurchatov Institute”, NBIC Centre, Moscow, 123182, Russia

    J. V. Grishchenko & M. L. Zanaveskin

Authors
  1. J. V. Grishchenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. L. Zanaveskin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to J. V. Grishchenko.

Additional information

Original Russian Text © J.V. Grishchenko, M.L. Zanaveskin, 2013, published in Kristallografiya, 2013, Vol. 58, No. 3, pp. 484–489.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Grishchenko, J.V., Zanaveskin, M.L. Investigation into the correlation factor of substrate and multilayer film surfaces by atomic force microscopy. Crystallogr. Rep. 58, 493–497 (2013). https://doi.org/10.1134/S1063774513030061

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063774513030061

Keywords

Search

Navigation