Abstract
Using atomic force microscopy, wear is performed and the results of determining wear resistances of 100-nm-thick Cu and SiO2 coatings and 3-μm-thick ZrN are presented. The dependences of the specific volumetric wear on the normal mechanical stress at the contact of an AFM probe with the surface during wear are found.
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Funding
The work was supported by the Russian Foundation for Basic Research (project no. 18-57-00015), the Belarusian Foundation for Basic Research (project no. F18R-239), and GKNT-BRFFI-Poland (project no. T18PLSHG-002).
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Translated by G. Dedkov
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Lapitskaya, V.A., Kuznetsova, T.A., Chizhik, S.A. et al. Wear of Thin Coatings with Different Hardness by Probe Methods. J. Surf. Investig. 14, 602–608 (2020). https://doi.org/10.1134/S1027451020030325
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DOI: https://doi.org/10.1134/S1027451020030325