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Self-propagating high-temperature synthesis and solid-phase reactions in bilayer thin films

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Abstract

Self-propagating high-temperature synthesis (SHS) in Al/Ni, Al/Fe, and Al/Co bilayer thin films is investigated. It is established that SHS is achieved in thin films at initiation temperatures 300–350° lower than in powders. The mechanism of SHS in thin films is similar to the process of explosive crystallization. It is shown that at the initial stage solid-phase reactions arising on the contact surface of condensate films can be self-propagating high-temperature synthesis. SHS could find application in different technologies for obtaining film components for microelectronics.

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Authors and Affiliations

  1. L. V. Kirenskii Institute of Physics, Siberian Branch of the Russian Academy of Sciences, 660036, Krasnoyarsk, Russia

    V. G. Myagkov, V. S. Zhigalov, L. E. Bykova & V. K. Mal’tsev

Authors
  1. V. G. Myagkov
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  2. V. S. Zhigalov
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  3. L. E. Bykova
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  4. V. K. Mal’tsev
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Zh. Tekh. Fiz. 68, 58–62 (October 1998)

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Myagkov, V.G., Zhigalov, V.S., Bykova, L.E. et al. Self-propagating high-temperature synthesis and solid-phase reactions in bilayer thin films. Tech. Phys. 43, 1189–1192 (1998). https://doi.org/10.1134/1.1259177

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  • DOI: https://doi.org/10.1134/1.1259177

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