Accurate Mask-To-Wafer Gap Measurements In The EBP Lithography Tool

W. Z apka; W. Haug; H. Bohlen

doi:10.1117/12.949727

2 January 1986 Accurate Mask-To-Wafer Gap Measurements In The EBP Lithography Tool

W. Z apka, W. Haug, H. Bohlen

Proceedings Volume 0565, Micron and Submicron Integrated Circuit Metrology; (1986) https://doi.org/10.1117/12.949727
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

We describe a new mask-to-wafer gap measurement technique, that has been implemented into the Electron-Beam Proximity Printing (EBP) lithography tool. In the EBP gap-measurement mode the parallel e-beam of 1 mm diameter performs scanning inclination about a perio-dic chip-registration pattern in the mask, resulting in the image of that mask pattern scanning across the wafer surface. Detection of strong scattering or reflection of electrons, when that image overlaps corresponding registration patterns on the wafer surface, reveals the image excursion in the wafer plane, which in turn is an accurate measure for the mask-wafer gap. An accuracy of + 1% for absolute mask-wafer gap data and - more important for application in EBP lithography - an accuracy of + 0.3% for relative mask-wafer gap variations was readily obtained over a gap range 560 μm to 1400 μm.

Citation Download Citation

W. Z apka, W. Haug, and H. Bohlen "Accurate Mask-To-Wafer Gap Measurements In The EBP Lithography Tool", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); https://doi.org/10.1117/12.949727

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available