New approach to the manufacturing of power microwave bipolar transistors at an irradiation of ohmic contacts: a computer simulation

Yury P. Snitovsky; Vasily A. Efremov

doi:10.1117/12.837085

17 June 2009 New approach to the manufacturing of power microwave bipolar transistors at an irradiation of ohmic contacts: a computer simulation

Yury P. Snitovsky, Vasily A. Efremov

Author Affiliations +

Proceedings Volume 7377, Twelfth International Workshop on Nanodesign Technology and Computer Simulations; 737718 (2009) https://doi.org/10.1117/12.837085
Event: Nano-Design, Technology, Computer Simulations, 2008, Minsk, Belarus

Abstract

Method providing possibility of controllable creation of areas with demanded physical and chemical properties is a key condition for radical progress in modern technologies. It is especially actual for creation of areas with the nanometer sizes. Two-dimensional physical modeling of process of an irradiation by phosphorus ions of generated ohmic contacts Mo-Si to the emitter of the silicon bipolar powerful transistor which structure has been made on new and standard technologies for the first time is demonstrated. Possibilities of this method are investigated and confirmed experimentally. In particular, it is shown that there is a possibility of purposeful change of a chemical compound on border Mo-Si, electrophysical properties of contacts molybdenum-silicon, electrophysical characteristics of areas of transistor structure, frequency and power parameters of transistors. Modeling was spent using of a program complex of company SILVACO.

Citation Download Citation

Yury P. Snitovsky and Vasily A. Efremov "New approach to the manufacturing of power microwave bipolar transistors at an irradiation of ohmic contacts: a computer simulation", Proc. SPIE 7377, Twelfth International Workshop on Nanodesign Technology and Computer Simulations, 737718 (17 June 2009); https://doi.org/10.1117/12.837085

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available