Infiltration of individual pores in macroporous silicon photonic crystals

Peter W. Nolte; Daniel Pergande; Stefan L. Schweizer; Markus Geuss; Roland Salzer; Brian Makowski; Martin Steinhart; Ralf B. Wehrspohn; Christoph Weder

doi:10.1117/12.824862

1 September 2009 Infiltration of individual pores in macroporous silicon photonic crystals

Peter W. Nolte, Daniel Pergande, Stefan L. Schweizer, Markus Geuss, Roland Salzer, Brian Makowski, Martin Steinhart, Ralf B. Wehrspohn, Christoph Weder

Author Affiliations +

Proceedings Volume 7393, Nanophotonic Materials VI; 73930S (2009) https://doi.org/10.1117/12.824862
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

A new and promising approach for the design and fabrication of novel optical devices is the functionalization of individual pores in 2D photonic crystals (PhC). This can be done by infiltrating the pores with polymers or dyes. We present a method to locally infiltrate individual pores. This new technique enables the fabrication of a new class of devices, such as optical switches or multiplexers. For the infiltration of individual pores 2D PhC templates made of macroporous silicon were used. Local addressing of the pores is carried out by using focused ion beam technology. For the infiltration itself the wetting assisted templating process is applied. We will present experimentally the infiltration of different polymers and different optical designs.

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Peter W. Nolte, Daniel Pergande, Stefan L. Schweizer, Markus Geuss, Roland Salzer, Brian Makowski, Martin Steinhart, Ralf B. Wehrspohn, and Christoph Weder "Infiltration of individual pores in macroporous silicon photonic crystals", Proc. SPIE 7393, Nanophotonic Materials VI, 73930S (1 September 2009); https://doi.org/10.1117/12.824862

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