A needle above plane is electron optics model

O. D. Potapkin

doi:10.1117/12.804373

5 June 2008 A needle above plane is electron optics model

O. D. Potapkin

Proceedings Volume 7121, Eighth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 712108 (2008) https://doi.org/10.1117/12.804373
Event: Eighth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2007, Moscow, Russian Federation

Abstract

Electron optics model of a cathode lens consisting of hyperboloid of rotation and a plane called "a needle above plane" is presented. The most important result is asymptotic crossover radius changing in wide range of tip radius changing and the half angle of the apex. The results can be useful for the description of thermionic guns for nanolithography.

Citation Download Citation

O. D. Potapkin "A needle above plane is electron optics model", Proc. SPIE 7121, Eighth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 712108 (5 June 2008); https://doi.org/10.1117/12.804373

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