Ultraviolet And Extreme Ultraviolet Response Of Charge-Coupled-Device Detectors

R. A. Stern; R. C. Catura; R. Kimble; A. F. Davidsen; M. Winzenread; M. M. Blouke; R. Hayes; D. M. Walton; J. L. Culhane

doi:10.1117/12.7974165

1 September 1987 Ultraviolet And Extreme Ultraviolet Response Of Charge-Coupled-Device Detectors

R. A. Stern, R. C. Catura, R. Kimble, A. F. Davidsen, M. Winzenread, M. M. Blouke, R. Hayes, D. M. Walton, J. L. Culhane

Author Affiliations +

Optical Engineering, Vol. 26, Issue 9, 269875 (September 1987). https://doi.org/10.1117/12.7974165

Abstract

We present results of a program to enhance the ultraviolet and extreme ultraviolet response of charge-coupled devices. The ultimate goal of our program is to develop a large format device with both high and stable quantum efficiency from 100 to 3000 A that can be used as a windowless imaging detector in a space environment. Ultraviolet quantum efficiency measurements have been made for several ion-implanted and laser-annealed test CCDs specially fabricated by Tektronix for this program. Quantum efficiencies as high as 22% at 2500 A , where the absorption depth in silicon is -55 A, have been observed in one such test CCD. Quantum efficiency measurements of standard back-illuminated RCA and Tektronix CCDs are also presented.

Citation Download Citation

R. A. Stern, R. C. Catura, R. Kimble, A. F. Davidsen, M. Winzenread, M. M. Blouke, R. Hayes, D. M. Walton, and J. L. Culhane "Ultraviolet And Extreme Ultraviolet Response Of Charge-Coupled-Device Detectors," Optical Engineering 26(9), 269875 (1 September 1987). https://doi.org/10.1117/12.7974165

Published: 1 September 1987

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available