Microprocessor-Based Automatic Heterodyne Interferometer

F. M. Mottier

doi:10.1117/12.7972412

1 October 1979 Microprocessor-Based Automatic Heterodyne Interferometer

F. M. Mottier

Author Affiliations +

Optical Engineering, Vol. 18, Issue 5, 185464 (October 1979). https://doi.org/10.1117/12.7972412

Abstract

The interferometer described in this article combines a number of principles known for a long time in a system of unusual versatility. The operation modes range from classical interferometry for visual or photographic evaluation of apertures up to 150 mm diameter, to programmed scan heterodyne interferometry with fringe counting and to time- and space-resolved subfringe measurement with better than 10 nm resolution. The instrument is primarily intended as a diagnostic tool in adaptive optics to monitor the deformable corrector mirror during operation.

Citation Download Citation

F. M. Mottier "Microprocessor-Based Automatic Heterodyne Interferometer," Optical Engineering 18(5), 185464 (1 October 1979). https://doi.org/10.1117/12.7972412

Published: 1 October 1979

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