Super-heterodyne laser interferometer using femtosecond frequency comb for linear encoder calibration system

Mariko Kajima; Hirokazu Matsumoto

doi:10.1117/12.726247

18 June 2007 Super-heterodyne laser interferometer using femtosecond frequency comb for linear encoder calibration system

Mariko Kajima, Hirokazu Matsumoto

Author Affiliations +

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66160G (2007) https://doi.org/10.1117/12.726247
Event: Optical Metrology, 2007, Munich, Germany

Abstract

A super-heterodyne laser interferometer for sub-nanometer length measurement system is proposed. This interferometer has a possibility to realize high resolution by using the self-zooming method and high accuracy by using external cavity diode laser which is stabilized to femtosecond frequency comb(fs-comb) as an optical source. This length measurement system is going to be applied for linear-encoder calibration system for national standards.

Citation Download Citation

Mariko Kajima and Hirokazu Matsumoto "Super-heterodyne laser interferometer using femtosecond frequency comb for linear encoder calibration system", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66160G (18 June 2007); https://doi.org/10.1117/12.726247

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