Calibration method with grating grooves based on precision vision measurement

Yingwu Xue; Yuning Zhong; Xuanze Wang; Qinghua Lv

doi:10.1117/12.717177

6 November 2006 Calibration method with grating grooves based on precision vision measurement

Yingwu Xue, Yuning Zhong, Xuanze Wang, Qinghua Lv

Proceedings Volume 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence; 63573A (2006) https://doi.org/10.1117/12.717177
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

This paper presents a new method of high-precision calibration with grating grooves for precision vision measurement system of micro-size part. After an image of high precision grating grooves are grabbed by CCD, a black-and-white striped picture may be gotten. A group of data being similar to sinusoid is gotten by calculating the sum of gray-value of pixels in each column. These calculated data are elaborately showed a Lissajous figure in one plane by translation for pixel. The size mapping coefficient between the grating groove and their image pixels of the optical measurement system is calculated by analyzing and processing the Lissajous figure. It is not necessary to calculate the interior and exterior parameters of the camera for the calibration of measurement system when this method is adopted. Finally, this paper gives the result of calibration and its error analysis for one optical system.

Citation Download Citation

Yingwu Xue, Yuning Zhong, Xuanze Wang, and Qinghua Lv "Calibration method with grating grooves based on precision vision measurement", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63573A (6 November 2006); https://doi.org/10.1117/12.717177

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