CMOS compatible vertical directional coupler for 3D optical circuits

J. K. Doylend; A. P. Knights; C. Brooks; P. E. Jessop

doi:10.1117/12.627884

12 October 2005 CMOS compatible vertical directional coupler for 3D optical circuits

J. K. Doylend, A. P. Knights, C. Brooks, P. E. Jessop

Proceedings Volume 5970, Photonic Applications in Devices and Communication Systems; 59700G (2005) https://doi.org/10.1117/12.627884
Event: Photonics North, 2005, Toronto, Canada

Abstract

We report simulation results for a directional coupler between silicon waveguides in different layers of a three-dimensional (3D) optical circuit. The coupling length is 1.4 mm. The device is manufacturable using standard CMOS technology provided individual waveguide layers can be vertically stacked. In simulations of coupling efficiency the design exhibits negligible loss with respect to translational and rotational misalignments of up to 0.5 μm. Efficiency degradation is less than 5% for etch depth and waveguide width variations of 0.4 μm, and less than 1 dB over the range of standard lithographic tolerances for variations from layer to layer in feature width, depth, and alignment.

Citation Download Citation

J. K. Doylend, A. P. Knights, C. Brooks, and P. E. Jessop "CMOS compatible vertical directional coupler for 3D optical circuits", Proc. SPIE 5970, Photonic Applications in Devices and Communication Systems, 59700G (12 October 2005); https://doi.org/10.1117/12.627884

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available