Tomographic microinterferometry as a measurement tool for 3D micro-optical phase elements

Pawel Kniazewski; Malgorzata Kujawinska; Witold Gorski

doi:10.1117/12.560906

2 August 2004 Tomographic microinterferometry as a measurement tool for 3D micro-optical phase elements

Pawel Kniazewski, Malgorzata Kujawinska, Witold Gorski

Proceedings Volume 5532, Interferometry XII: Applications; (2004) https://doi.org/10.1117/12.560906
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

This paper presents tomographic microinterferometry as a tool for determination of 3D refractive index distribution in optically transparent elements. Principles of method and exemplary results are obtained in laboratory system are given. Concept of insensitive for ambient influence field tomograph dedicated for fast determination of refractive index distribution is given. Decreasing of acquisition and computing time is achieved by reduction of number of views, for which measurements are taken. The influence of decreasing number of projection is analyzed in order to determine a certain compromise between the quality of n(x,y,z) reconstruction and time of measurement.

Citation Download Citation

Pawel Kniazewski, Malgorzata Kujawinska, and Witold Gorski "Tomographic microinterferometry as a measurement tool for 3D micro-optical phase elements", Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); https://doi.org/10.1117/12.560906

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