Systematic studies on transition layers of carbides between CVD diamond films and substrates of strong carbide-forming elements

Xiang-Liu Jiang; Fang-Qing Zhang; Jiang-Qi Li; Bin Yang; Guang-Hua Chen

doi:10.1117/12.48293

1 December 1991 Systematic studies on transition layers of carbides between CVD diamond films and substrates of strong carbide-forming elements

Xiang-Liu Jiang, Fang-Qing Zhang, Jiang-Qi Li, Bin Yang, Guang-Hua Chen

Author Affiliations +

Proceedings Volume 1534, Diamond Optics IV; (1991) https://doi.org/10.1117/12.48293
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The nucleation and growth mechanism of polycrystalline diamond films prepared by chemical vapor deposition (CVD) have received increasing research interest. To verify the existence of the transition layers between CVD diamond films and substrates, and to investigate their composition, structure and properties are very meaningful research topics for understanding the mechanism of diamond film growth and developing the applications of CVD diamond films. In this work, the transition layers of carbides for the substrates of molybdenum (Mo), silicon (Si), tungsten (W), tantalum (Ta), and niobium (Nb) and titanium (Ti) have been systematically studied by x-ray diffraction characterization. The experiment results have provided evidence of the existence of transition layers and have revealed that the transition layers are polycrystalline Mo₂C, SiC, WC and W₂C, TaC and Ta₂C, NbC and Nb₂C, as well as TiC for the substrates of Mo, Si, W, Ta, Nb and Ti, respectively.

Citation Download Citation

Xiang-Liu Jiang, Fang-Qing Zhang, Jiang-Qi Li, Bin Yang, and Guang-Hua Chen "Systematic studies on transition layers of carbides between CVD diamond films and substrates of strong carbide-forming elements", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); https://doi.org/10.1117/12.48293

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