Paper
4 June 2002 Design considerations for fast-steering mirrors (FSMs)
Michael N. Sweeney, Gerald A. Rynkowski, Mehrdad Ketabchi, Robert Crowley
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Abstract
The single-axis and two-axis, flexure mounted, fast steering mirror (FSM) represents a compact, low cost, high performance design solution for a variety of emerging optical scanning and beam stabilization applications. Such devices are used to correct for polygon cross scan errors in prepress photography, acquire and lock beams within free space laser telecom systems, modulate tilt and cavity control in interferometers, maintain beam stabilization in the presence of thermal drift and vibration, and provide general two axis beam scanning. This paper discusses the tradeoffs among range of motion, spring selection, actuator types, mirror designs, and control systems. Actual product design and performance data is presented for a single axis FSM used for polygon cross scan error correction, and a dual axis FSM used for free space laser telecom.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael N. Sweeney, Gerald A. Rynkowski, Mehrdad Ketabchi, and Robert Crowley "Design considerations for fast-steering mirrors (FSMs)", Proc. SPIE 4773, Optical Scanning 2002, (4 June 2002); https://doi.org/10.1117/12.469197
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Cited by 29 scholarly publications.
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KEYWORDS
Mirrors

Actuators

Metals

Control systems

Digital signal processing

Ferroelectric materials

Control systems design

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