Processing technique for interference pattern with step using phase-shift interferometry

Aiming Ge; Lei Chen; Jinbang Chen; Rihong Zhu

doi:10.1117/12.402831

6 October 2000 Processing technique for interference pattern with step using phase-shift interferometry

Aiming Ge, Lei Chen, Jinbang Chen, Rihong Zhu

Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402831
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

Based on introducing the principle and method of processing technique for interference pattern with step using the characteristic of phase-shift interferometry. The paper has discussed a new phase-unwrapping algorithm for the phase map containing discontinuities. The correct phase values in the presence of discontinuities, especially those caused by the object with height steps, can be obtained. This algorithm is fast and accurate. The results of the measurement of three- dimensional object with height steps are presented. These techniques have been successfully applied to measure the surface and wave aberration of the system with step.

Citation Download Citation

Aiming Ge, Lei Chen, Jinbang Chen, and Rihong Zhu "Processing technique for interference pattern with step using phase-shift interferometry", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402831

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