Scanning silicon micromirror using a bidirectionally movable magnetic microactuator

Hyoung J. Cho; Jun Yan; Stephen T. Kowel; Fred Richard Beyette Jr.; Chong Hyuk Ahn

doi:10.1117/12.396520

22 August 2000 Scanning silicon micromirror using a bidirectionally movable magnetic microactuator

Hyoung J. Cho, Jun Yan, Stephen T. Kowel, Fred Richard Beyette Jr., Chong Hyuk Ahn

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396520
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

In this work, a scanning silicon micromirror using a bi- directionally movable magnetic microactuator is designed, fabricated and characterized. Although there have been technical difficulties in realizing bi-directional motion in magnetic MOEMS devices for the lack of a suitable structuring technique for permanent magnet components, we overcome those by using UV-LIGA process of thick CONiMnP alloy films and arrays. Based on this new fabrication technique, hard magnetic films or arrays are directly electroplated on silicon cantilever beams in order to compose moving mirror parts. A micromirror is constructed by combining the beam with an electromagnet. According to the change of current in electromagnets, the micromirrors are deflected either upward or downward depending on the direction of magnetic field generated by the electromagnets. Optical properties of the scanning mirrors are measured by a He-Ne laser beam source with the wavelength of 632.8 nm and an optical power detector. A prototype scanning micromirror shows +/- 60 micrometers deflections at the current of +/- 100 mA. The Gaussian profile of the laser beam is well preserved. The reflectance is above 98 percent for the mirrors coated with aluminum films.

Citation Download Citation

Hyoung J. Cho, Jun Yan, Stephen T. Kowel, Fred Richard Beyette Jr., and Chong Hyuk Ahn "Scanning silicon micromirror using a bidirectionally movable magnetic microactuator", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396520

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