Design of compliant mechanisms: applications to MEMS

Sridhar Kota

doi:10.1117/12.354294

20 July 1999 Design of compliant mechanisms: applications to MEMS

Sridhar Kota

Proceedings Volume 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS; (1999) https://doi.org/10.1117/12.354294
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

Compliant mechanisms are monolithic mechanical structures that rely on elastic deformation to generate sophisticated mechanical functions. This paper presents an overview of mathematical procedures employed for designing compliant mechanisms. The paper outlines: (1) topological synthesis-- which involves generation of a functional design in the form of a feasible topology starting from input/output force/motion specifications, and (2) size and shape optimization--to meet performance requirements. Some examples of compliant MEMS are also presented.

Citation Download Citation

Sridhar Kota "Design of compliant mechanisms: applications to MEMS", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354294

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available