Enhancement of AFM images by compensating the hysteresis and creep effect within PZT

Hewon Jung; Jongyoup Shim; Dae gab Gweon

doi:10.1117/12.347827

7 May 1999 Enhancement of AFM images by compensating the hysteresis and creep effect within PZT

Hewon Jung, Jongyoup Shim, Dae gab Gweon

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347827
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

In equi-force mode among the AFM scanning modes, the scanning data of a sample is acquired by Z-axis PZT input voltages. But, PZT actuator has a hysteresis and creep between the input voltages and the output displacements. These nonlinearities make a distortion in scanning images. We propose that the creep effect of stack-type PZT shows hysteresis property and classical preisach model can be applied to AFM scanning data according to this property. Finally we will prove that AFM image is improved by the classical preisach model application.

Citation Download Citation

Hewon Jung, Jongyoup Shim, and Dae gab Gweon "Enhancement of AFM images by compensating the hysteresis and creep effect within PZT", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347827

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