Microtechnology for instrumentation

Raymond P. Mariella Jr.

doi:10.1117/12.304383

26 March 1998 Microtechnology for instrumentation

Raymond P. Mariella Jr.

Proceedings Volume 3258, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications; (1998) https://doi.org/10.1117/12.304383
Event: BiOS '98 International Biomedical Optics Symposium, 1998, San Jose, CA, United States

Abstract

For the last two decades, the majority of research and development at LLNL in microtechnology has focused on photonics devices and bulk micromachining, including micro- electro-mechanical systems (MEMS) and associated areas. For the last ten years, we have used these capabilities to address our analytical instrumentation needs. Just as the integrated circuits in the 1960's enabled the fabrication of portable electronics, MEMS and miniature photonics have enabled the fabrication of analytical instruments that are either higher performance, smaller, more portable, or are combinations of these. Examples of these are our portable thermal cyclers for DNA analysis, our hand-held gas chromatography, our flow-stream-waveguide-based flow cytometer, and our etched-microchannel electrophoresis systems. This presentation will describe these and some related developments.

Citation Download Citation

Raymond P. Mariella Jr. "Microtechnology for instrumentation", Proc. SPIE 3258, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications, (26 March 1998); https://doi.org/10.1117/12.304383

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