Compact ArF excimer lasers specific to microlithography and surgery

Hitoshi Sekita; Jun-ichi Yano; Akifumi Tada; Masashi Tamegai; Kenichi Yoshida; Tadashi Kasamatsu; Shinji Ito; Takashi Saito; Yukio Ogura

doi:10.1117/12.271552

4 April 1997 Compact ArF excimer lasers specific to microlithography and surgery

Hitoshi Sekita, Jun-ichi Yano, Akifumi Tada, Masashi Tamegai, Kenichi Yoshida, Tadashi Kasamatsu, Shinji Ito, Takashi Saito, Yukio Ogura

Author Affiliations +

Proceedings Volume 2987, Gas and Chemical Lasers and Applications II; (1997) https://doi.org/10.1117/12.271552
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

High repetition rate operation technology and spectral narrowing technology with compact excimer lasers whose cross-sectional dimensions are around 120 by 120 mm. High repetition rate operation over 1.5 kHz and spectral narrowing to 1 pm are reported. These technologies are essential to promising applications of ArF excimer lasers. High resolution pattern of 0.16 micrometer line and space is demonstrated by an optical laser lithography with the compact ArF excimer laser. The smallest ArF excimer laser specific to the photo-chemical surgery of cornea is also presented.

Citation Download Citation

Hitoshi Sekita, Jun-ichi Yano, Akifumi Tada, Masashi Tamegai, Kenichi Yoshida, Tadashi Kasamatsu, Shinji Ito, Takashi Saito, and Yukio Ogura "Compact ArF excimer lasers specific to microlithography and surgery", Proc. SPIE 2987, Gas and Chemical Lasers and Applications II, (4 April 1997); https://doi.org/10.1117/12.271552

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available