Highly uniform and reproducible visible to near-infrared vertical-cavity surface-emitting lasers grown by MOVPE

Hong Q. Hou; Kent D. Choquette; B. Eugene Hammons; William G. Breiland; Mary Hagerott Crawford; Kevin L. Lear

doi:10.1117/12.271070

4 April 1997 Highly uniform and reproducible visible to near-infrared vertical-cavity surface-emitting lasers grown by MOVPE

Hong Q. Hou, Kent D. Choquette, B. Eugene Hammons, William G. Breiland, Mary Hagerott Crawford, Kevin L. Lear

Author Affiliations +

Proceedings Volume 3003, Vertical-Cavity Surface-Emitting Lasers; (1997) https://doi.org/10.1117/12.271070
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

We present the growth and characterization of vertical- cavity surface emitting lasers (VCSELs) from visible to near-infrared wavelength grown by metalorganic vapor phase epitaxy. Discussions on the growth issue of VCSEL materials include the control on growth rate and composition using an in situ normal-incidence reflectometer, optimization of ultra-high material uniformity, and comprehensive p- and n- type doping study in AlGaAs by CCl₄ and Si₂H₆ over the entire Al composition range. We also demonstrate our recent achievements of selectively oxidized VCSELs which include the first room-temperature continues-wave demonstration of all-AlGaAs 700-nm red VCSELs, high- performance n-side up 850-nm VCSELs, and low threshold current and low-threshold voltage 1.06 micrometer VCSELs using InGaAs/GaAsP strain-compensated quantum wells.

Citation Download Citation

Hong Q. Hou, Kent D. Choquette, B. Eugene Hammons, William G. Breiland, Mary Hagerott Crawford, and Kevin L. Lear "Highly uniform and reproducible visible to near-infrared vertical-cavity surface-emitting lasers grown by MOVPE", Proc. SPIE 3003, Vertical-Cavity Surface-Emitting Lasers, (4 April 1997); https://doi.org/10.1117/12.271070

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