Microstructure and optical properties of black silicon layers

Stanislav Jurečka; Martin Králik; Emil Pinčík; Kentaro Imamura; Taketoshi Matsumoto; Hikaru Kobayashi

doi:10.1117/12.2518368

18 December 2018 Microstructure and optical properties of black silicon layers

Stanislav Jurečka, Martin Králik, Emil Pinčík, Kentaro Imamura, Taketoshi Matsumoto, Hikaru Kobayashi

Proceedings Volume 10976, 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 109760I (2018) https://doi.org/10.1117/12.2518368
Event: 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2018, Lednice, Czech Republic

Abstract

Black silicon structures were formed by etching of silicon substrates based on the surface structure chemical transfer method. Formed structures show gradient of material density in the nanocrystalline Si layer leading to ultralow spectral reflectance below 3% in wide spectral region. In study of the development of microstructure properties during the forming procedure the TEM images were used. Information abut the microstructure observed in the TEM images was analysed by the Abbott-Firestone method. By using this approach limiting conditions for the black silicon layer formation were obtained. Spectral reflectances of studied samples were modelled by using the effective medium theory. Multilayer theoretical model based on splitting the black silicon layer into 20 sublayers was constructed. Optical properties of each individual sublayer were described by using Bruggeman effective media theory combining Si, SiO₂ and void fractions. Gradual development of real and imaginary part of complex index of refraction was observed in the volume of black silicon layers. Results of optical analysis correspond to the microstructure development during sample forming.

Citation Download Citation

Stanislav Jurečka, Martin Králik, Emil Pinčík, Kentaro Imamura, Taketoshi Matsumoto, and Hikaru Kobayashi "Microstructure and optical properties of black silicon layers", Proc. SPIE 10976, 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 109760I (18 December 2018); https://doi.org/10.1117/12.2518368

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